Cyantek offers a full line of chrome etchants to meet
a wide range of individual requirements of the mask making, semiconductor
and other applications in the electronic industry. These etchants
are designed to provide minimum undercutting and maximum critical
dimension control and repeatability. A brief synopsis of these
products is displayed in the following table:
Product
Special Feature(s)
Acid
Typical Etch Rates
(A/sec)
Shelf Life in Months
(Stored at 50-70F)
CR-4
Cr, Cu, Ni & NiCr Etchant
Nitric
22
12
CR-5
------
Perchloric
19
12
CR-7
Most Common
Perchloric
24
12
CR-9
------
Perchloric
30
12
CR-12
Cr Oxide Etch,
Fastest Product
Perchloric
50
12
CR-41
Slowest Product
Perchloric
7
12
CR-14
Least Undercutting,
Shortest Shelf Life
Acetic
18
3
ES-1
No Acid
Water
*ND
12
CR-100
Basic,
Copper Safe
Sodium Hydroxide
100 A/min.
12
*ND = Not determined.
I. Many other formulations are available to meet your needs.
II. Most, but not all, of our CR products are regularly available with
added surfactants at two levels of “S” and/or “S10”.
This is intended to improve the wetting characteristic of the
product for <1µ geometries, resulting in optimum etch
uniformity. For example, CR-7 is one of our widely-used chrome
etchants and it is available as CR-7S and CR-7S10, as well.
III. The reported etch rates are performed on photomask blanks at
21?C, coated with 980 A of anti-reflective chrome. Etch rates
are not absolute values. They may vary with chrome type, chrome
blank supplier, process equipment utilized and type of agitation.
